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AZ 40XT-11D

 
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J. Brossard
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PostPosted: Mon 12 Jul, 2010 16:04    Post subject: AZ 40XT-11D Reply with quote
Hi everybody,

Anyone knows what is the photoacid generator in the AZ 40XT-11D resist, and what it releases? N2 or CO2?

Thanks for your help!!
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