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Etching of Silver

 
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Robosom
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PostPosted: Wed 16 Jun, 2010 04:24    Post subject: Etching of Silver Reply with quote
Hi,

I have a problem regarding etching of silver beneath patterned resist. So there is a 10nm metal layer and patterned resist on top and I have to remove the metal from the exposed regions and keep it safe beneath the photoresist. Wet etching is one method but the etch rate is too quick for a thin 10nm metal layer. Can anyone please suggest another way to do it?

Thanks,
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