MicroChemicals Homepage - Everything For Microstructuring LithoTalk
Forum for all Fields of Lithography and Microstructuring - NO Registration Required for Posting!
 
 FAQFAQ   SearchSearch   MemberlistMemberlist   UsergroupsUsergroups   RegisterRegister   ProfileProfile   Log in to check your private messagesLog in to check your private messages   Log inLog in 
 German Lithotalk Forum

high transparent photoresist

 
Post new topic   Reply to topic    LithoTalk Forum Index -> Suited Photoresists
View previous topic :: View next topic  
Author Message
zhangshenfu



Joined: 06 Jul 2009
Posts: 2

PostPosted: Mon 06 Jul, 2009 08:17    Post subject: high transparent photoresist Reply with quote

I want to . high transparent photoresist(more than 92%),but I don't know where do have.
Back to top
View user's profile Send private message
Guest
Guest





PostPosted: Mon 06 Jul, 2009 10:52    Post subject: Photo Resist with High Transparency Reply with quote

Hello,

may I ask in which wavelengths range the resist should be transparent?
The negative tone resist AZ nLOF 2000 has almost no absorption in the VIS, and looks almost completely clear even when coated up to 100 µm.
Back to top
zhangshenfu



Joined: 06 Jul 2009
Posts: 2

PostPosted: Mon 17 Aug, 2009 02:42    Post subject: transparent photoresist Reply with quote

thank you!
in VIS(370~780nm)
Back to top
View user's profile Send private message
Guest
Guest





PostPosted: Wed 19 Aug, 2009 07:41    Post subject: Transparent Photo Resist Reply with quote

Hello,

this makes it difficult - 370 nm is very close to i-line where all not-DUV resists strongly absorb - and have to absorb for exposure.

As mentioned, the AZ nLOF 2000 negative resist is almost transparent in the VIS, and looks only a little bit yellowish to the human eye due to a small absorption in the blue range near 380 nm.

If the resist should also be transparent near i-line, may I ask at which wavelength you would like to expose the resist?
Back to top
Display posts from previous:   
Post new topic   Reply to topic    LithoTalk Forum Index -> Suited Photoresists All times are GMT + 1 Hour
Page 1 of 1

 
Jump to:  
You can post new topics in this forum
You can reply to topics in this forum
You cannot edit your posts in this forum
You cannot delete your posts in this forum
You cannot vote in polls in this forum


Powered by phpBB © 2001, 2005 phpBB Group     
Administration by MicroChemicals    Imprint and Disclaimer    Data Protection Statement