LithoTalk

fermion · Joined: 04 Jan 2007 Posts: 6

Hi Dear Colleaque,
I would like to etch gold that has 250 nm. But i don't want to etch indium.
What can i do

Thanks......

tim · Guest

I suggest Potassium Cyanide

Guest · Guest

Hello,

If have no experience with the selectivity of various gold etching mixtures, but I found in literature that one requires "hot aqua regia" for the etching of Indium. So I assume that at room temperature, the gold should be etched much faster?

If you would not like to use the toxic cyanides, maybe a KI/I2 solution also helps, but I don't know if this attacks Indium.

Here:

http://www.microchemicals.com/technical_information/gold_etching.pdf

you can find a document concerning etching of gold, but with no special information on the selectivity to Indium.

Maybe this helps a little bit ...?