LithoTalk

[Clara]

I have a copper sample that I would like to etch, however there is also a thin layer of platinum (about 5 nm thick) that cannot be etched. What is a good solution to use?


Thank you.

[Guest]

Hello,

is the platinum layer on top of the copper, or underneath the copper?
Do you want to etch the Cu/Pt stack, or only one of both metals?
Do you want to etch through a photo resist mask?

These infos would help me to give some recomemndations, thank you!