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Dry etching of Magnesium Fluoride (MgF2)

 
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mike
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PostPosted: Tue 09 Jun, 2009 21:01    Post subject: Dry etching of Magnesium Fluoride (MgF2) Reply with quote

Does anyone have a recipe for etching MgF2? The film would be on an ITO-coated glass substrate.
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