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 German Lithotalk Forum

dummy dispense

 
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ahie
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PostPosted: Fri 04 Apr, 2008 09:16    Post subject: dummy dispense Reply with quote
I am user of AZ1518 and nLof 2070 resist, and i am in the stage of deciding how frequent should my dummy dispense to be. Can you tell me what is your reccomendation frequancy and volume for dummy dispense on these 2 resist? thank you
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PostPosted: Fri 05 Sep, 2008 17:34    Post subject: Reply with quote
I always use dummy dispenses before starting a process.

How many and which volume depends on your nozzle, line and pump construction and of course the resist itself.

The main problem is usually resist flake buildup on the nozzle that must be cleaned away, sometimes manually with aceton.

Apart from that, if the resist sits longer in the top end of the nozzle than 5 minutes I would make sure to do a dummy dispense.
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