MicroChemicals Homepage - Everything For Microstructuring LithoTalk
Forum for all Fields of Lithography and Microstructuring - NO Registration Required for Posting!
 
 FAQFAQ   SearchSearch   MemberlistMemberlist   UsergroupsUsergroups   RegisterRegister   ProfileProfile   Log in to check your private messagesLog in to check your private messages   Log inLog in 
 German Lithotalk Forum

wet etch Ni 100nm

 
Post new topic   Reply to topic    LithoTalk Forum Index -> Nickel
View previous topic :: View next topic  
Author Message
guest
Guest
PostPosted: Tue 22 Jul, 2008 16:54    Post subject: wet etch Ni 100nm Reply with quote
Hi!
Has anyone tried to etch Ni 100nm using H3PO4:HNO3 and water? How long it will take ?more than 10 min?
Back to top
Guest
Guest
PostPosted: Fri 25 Jul, 2008 07:19    Post subject: Wet Etch Ni Reply with quote
Hello,

I did not check it for my own, but I found the following statement:

3 : 3 : 1 : 1 - H3PO4 : HNO3 : CH3COOH : H2O ~15min/micron @ RT with air exposure every 15 seconds

Maybe this helps?
Back to top
guest
Guest
PostPosted: Fri 25 Jul, 2008 16:56    Post subject: Reply with quote
yup the composition you mentioned is Al etchant, so itīs almost the same with what I wanted to use. Iīve tried to etch for 20 min,looked good but next time Iīll reduce the time..I hope itīll work too!! Thanks lot!
Back to top
Fariborz Nadi
Guest
PostPosted: Mon 24 May, 2010 20:48    Post subject: Wet Ni Etch Reply with quote
Any issues with mouse bites? Does Al etch work well patterned wafer? I am having mouse bite issue. Any ideas?
Back to top
Display posts from previous:   
Post new topic   Reply to topic    LithoTalk Forum Index -> Nickel All times are GMT + 1 Hour
Page 1 of 1

 
Jump to:  
You can post new topics in this forum
You can reply to topics in this forum
You cannot edit your posts in this forum
You cannot delete your posts in this forum
You cannot vote in polls in this forum


Powered by phpBB © 2001, 2005 phpBB Group     
Administration by MicroChemicals    Imprint and Disclaimer    Data Protection Statement