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Cr on SU8 resist

 
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PostPosted: Tue 22 Jan, 2008 12:42    Post subject: Cr on SU8 resist Reply with quote
Hallo...has anyone ever tried to deposite Cr on SU8 resist? I used thermal evaporation,for 100 nm and also 25 nm Cr, but the result was not good, many cracks, and the surface was really not flat.
Thank you for any advice!
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