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Resist Coating
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Resist Coating
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prewet solvent for AZ resist
0
ahie
358
Wed 03 Mar, 2010 06:38
ahie
dummy dispense
1
ahie
1532
Fri 05 Sep, 2008 17:34
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Softlithography/ Microcontact printing
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markag
956
Wed 13 Aug, 2008 12:39
markag
I would like to get the data sheet of AZ 4999
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Bong
1151
Tue 26 Feb, 2008 05:16
Bong
coat on Teflon
3
charlyking
1458
Wed 20 Feb, 2008 08:34
Guest
Resist and Daylight
3
fermion
2382
Thu 11 Jan, 2007 16:26
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Resist Coating
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Photoresist Processing
----------------
Specific Resists or Polymers
Storage and Handling of Photoresists
Substrate Pretreatment
Adhesion Promotion
Resist Coating
Softbake (Prebake)
Rehydration
Exposure
Post Exposure Bake
Development
Hardbake
Unspecific
Dry Etching
----------------
Deformation or Bubbling of the Fotoresist Mask
Resist Erosion
Resist Removal After Etching
Silicon Dry Etching
Dry etching of Other Materials
Wet Etching
----------------
General
Aluminium
Chrome
Copper
Glass / Quartz / SiO
2
Gold
Nickel
Silicon
SiN
X
Titanium
Other Materials
Lift-Off
----------------
Suited Photoresists
Coating
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