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Photoresist Processing
----------------
Specific Resists or Polymers
Storage and Handling of Photoresists
Substrate Pretreatment
Adhesion Promotion
Resist Coating
Softbake (Prebake)
Rehydration
Exposure
Post Exposure Bake
Development
Hardbake
Unspecific
Dry Etching
----------------
Deformation or Bubbling of the Fotoresist Mask
Resist Erosion
Resist Removal After Etching
Silicon Dry Etching
Dry etching of Other Materials
Wet Etching
----------------
General
Aluminium
Chrome
Copper
Glass / Quartz / SiO
2
Gold
Nickel
Silicon
SiN
X
Titanium
Other Materials
Lift-Off
----------------
Suited Photoresists
Coating
Lift-Off
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