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German Lithotalk Forum| View unanswered posts |
| Forum | Topics | Posts | Last Post | |
|---|---|---|---|---|
| Photoresist Processing | ||||
| Dry Etching | ||||
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Deformation or Bubbling of the Fotoresist Mask The resist mask starts roundening or foaming during dry etching |
0 | 0 | No Posts |
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Resist Erosion Etch rate ratio between the resist mask and the material to be etched |
1 | 2 | Fri 06 Aug, 2010 15:29 Guest  |
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Resist Removal After Etching Processes and media to strip the resist mask after dry etching |
1 | 7 | Fri 22 Jun, 2007 15:03 MK |
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Silicon Dry Etching Dry etching of Silicon - recipes and parameters |
0 | 0 | No Posts |
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Dry etching of Other Materials Dry etching of other materials - recipes, parameters and peculiarities |
1 | 1 | Tue 09 Jun, 2009 21:01 mike |
| Wet Etching | ||||
| Lift-Off | ||||
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