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German Lithotalk Forum| View unanswered posts |
| Forum | Topics | Posts | Last Post | |
|---|---|---|---|---|
| Photoresist Processing | ||||
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Specific Resists or Polymers Questions on special photoresists or photosensitive films in general |
21 | 72 | Mon 12 Jul, 2010 16:04 J. Brossard  |
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Storage and Handling of Photoresists Storage conditions, handling and the effects of photoresist ageing |
0 | 0 | No Posts |
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Substrate Pretreatment Cleaning and preparing the substrate for coating |
3 | 8 | Wed 18 Aug, 2010 21:24 Reveille |
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Adhesion Promotion Improving the adhesion between substrate and resist or any other films coated onto the substrate |
3 | 9 | Mon 23 Feb, 2009 18:07 Rinke |
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Resist Coating Spin coating, spray coating, roller coating and dip coating |
6 | 13 | Wed 03 Mar, 2010 06:38 ahie |
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Softbake (Prebake) The baking step between resist coating and exposure |
1 | 1 | Thu 22 Jul, 2010 06:26 kanan |
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Rehydration The delay between softbake and exposure |
0 | 0 | No Posts |
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Exposure Exposure of the photoresist |
4 | 15 | Tue 29 Jun, 2010 13:51 Guest |
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Post Exposure Bake The baking step between exposure and development |
0 | 0 | No Posts |
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Development Developing the exposed photoresist |
1 | 2 | Wed 17 Jan, 2007 16:02 Guest |
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Hardbake Baking the developed resist |
1 | 5 | Wed 04 Mar, 2009 05:34 baturin |
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Unspecific Questions not to be related with a certain process step |
3 | 6 | Fri 14 Aug, 2009 11:04 sajjad |
| Dry Etching | ||||
| Wet Etching | ||||
| Lift-Off | ||||
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