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Photoresist Processing  
No new posts Specific Resists or Polymers
Questions on special photoresists or photosensitive films in general
   
31 110 Thu 01 Jan, 1970 01:00
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No new posts Storage and Handling of Photoresists
Storage conditions, handling and the effects of photoresist ageing
   
2 2 Thu 01 Jan, 1970 01:00
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No new posts Substrate Pretreatment
Cleaning and preparing the substrate for coating
   
3 13 Thu 01 Jan, 1970 01:00
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No new posts Adhesion Promotion
Improving the adhesion between substrate and resist or any other films coated onto the substrate
   
7 15 Thu 01 Jan, 1970 01:00
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No new posts Resist Coating
Spin coating, spray coating, roller coating and dip coating
   
10 32 Thu 01 Jan, 1970 01:00
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No new posts Softbake (Prebake)
The baking step between resist coating and exposure
   
1 2 Fri 26 Nov, 2010 12:31
Litho-User View latest post
No new posts Rehydration
The delay between softbake and exposure
   
1 2 Mon 27 Dec, 2010 17:37
Litho View latest post
No new posts Exposure
Exposure of the photoresist
   
13 35 Thu 01 Jan, 1970 01:00
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No new posts Post Exposure Bake
The baking step between exposure and development
   
2 3 Thu 01 Jan, 1970 01:00
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No new posts Development
Developing the exposed photoresist
   
3 6 Thu 03 May, 2012 10:52
ALCAVIO View latest post
No new posts Hardbake
Baking the developed resist
   
2 10 Thu 01 Jan, 1970 01:00
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No new posts Unspecific
Questions not to be related with a certain process step
   
6 15 Thu 08 Mar, 2012 12:59
Rui View latest post
Dry Etching  
No new posts Deformation or Bubbling of the Fotoresist Mask
The resist mask starts roundening or foaming during dry etching
   
0 0 No Posts
No new posts Resist Erosion
Etch rate ratio between the resist mask and the material to be etched
   
1 2 Fri 06 Aug, 2010 15:29
Guest View latest post
No new posts Resist Removal After Etching
Processes and media to strip the resist mask after dry etching
   
1 10 Thu 01 Jan, 1970 01:00
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No new posts Silicon Dry Etching
Dry etching of Silicon - recipes and parameters
   
0 0 No Posts
No new posts Dry etching of Other Materials
Dry etching of other materials - recipes, parameters and peculiarities
   
3 3 Sat 19 May, 2012 23:45
gokurt View latest post
Wet Etching  
No new posts General
General topics on wet chemical etching
   
6 8 Thu 01 Jan, 1970 01:00
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No new posts Aluminium
Wet chemical etching of Aluminium
   
0 0 No Posts
No new posts Chrome
Wet chemical etching of Chrome
   
0 0 No Posts
No new posts Copper
Wet chemical etching of Copper
   
5 7 Thu 01 Jan, 1970 01:00
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No new posts Glass / Quartz / SiO2
Wet chemical etching of glasses, quartz or SiO2
   
1 1 Thu 01 Jan, 1970 01:00
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No new posts Gold
Wet chemical etching of Gold
   
2 4 Thu 01 Jan, 1970 01:00
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No new posts Nickel
Wet chemical etching of Nickel
   
1 5 Thu 20 Oct, 2011 16:25
Guest View latest post
No new posts Silicon
Wet chemical etching of Silicon
   
3 7 Thu 01 Jan, 1970 01:00
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No new posts SiNX
Wet chemical etching of SiNX
   
1 2 Sat 27 May, 2006 11:25
Guest View latest post
No new posts Titanium
Wet chemical etching of Titanium
   
0 0 No Posts
No new posts Other Materials
Wet chemical etching of other materials not mentioned here
   
2 6 Thu 01 Jan, 1970 01:00
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Lift-Off  
No new posts Suited Photoresists
Photoresists suited for lift-off application
   
9 25 Thu 01 Jan, 1970 01:00
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No new posts Coating
Topics on coating of various materials on the resist mask
   
1 1 Tue 22 Jan, 2008 12:42
guest View latest post
No new posts Lift-Off
How to attain a good lift-off
   
10 19 Thu 01 Jan, 1970 01:00
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