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German Lithotalk Forum| View unanswered posts |
| Forum | Topics | Posts | Last Post | |
|---|---|---|---|---|
| Photoresist Processing | ||||
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Specific Resists or Polymers Questions on special photoresists or photosensitive films in general |
16 | 60 | Fri 08 Jan, 2010 05:32 acaaca  |
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Storage and Handling of Photoresists Storage conditions, handling and the effects of photoresist ageing |
0 | 0 | No Posts |
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Substrate Pretreatment Cleaning and preparing the substrate for coating |
3 | 5 | Fri 06 Mar, 2009 11:21 pdd |
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Adhesion Promotion Improving the adhesion between substrate and resist or any other films coated onto the substrate |
3 | 9 | Mon 23 Feb, 2009 18:07 Rinke |
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Resist Coating Spin coating, spray coating, roller coating and dip coating |
5 | 12 | Fri 05 Sep, 2008 17:34 Guest |
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Softbake (Prebake) The baking step between resist coating and exposure |
0 | 0 | No Posts |
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Rehydration The delay between softbake and exposure |
0 | 0 | No Posts |
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Exposure Exposure of the photoresist |
2 | 10 | Mon 11 Aug, 2008 11:22 Guest |
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Post Exposure Bake The baking step between exposure and development |
0 | 0 | No Posts |
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Development Developing the exposed photoresist |
1 | 2 | Wed 17 Jan, 2007 16:02 Guest |
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Hardbake Baking the developed resist |
1 | 5 | Wed 04 Mar, 2009 05:34 baturin |
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Unspecific Questions not to be related with a certain process step |
3 | 6 | Fri 14 Aug, 2009 11:04 sajjad |
| Dry Etching | ||||
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Deformation or Bubbling of the Fotoresist Mask The resist mask starts roundening or foaming during dry etching |
0 | 0 | No Posts |
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Resist Erosion Etch rate ratio between the resist mask and the material to be etched |
0 | 0 | No Posts |
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Resist Removal After Etching Processes and media to strip the resist mask after dry etching |
1 | 7 | Fri 22 Jun, 2007 15:03 MK |
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Silicon Dry Etching Dry etching of Silicon - recipes and parameters |
0 | 0 | No Posts |
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Dry etching of Other Materials Dry etching of other materials - recipes, parameters and peculiarities |
1 | 1 | Tue 09 Jun, 2009 21:01 mike |
| Wet Etching | ||||
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General General topics on wet chemical etching |
12 | 12 | Thu 01 Jan, 1970 01:00 |
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Aluminium Wet chemical etching of Aluminium |
0 | 0 | No Posts |
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Chrome Wet chemical etching of Chrome |
0 | 0 | No Posts |
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Copper Wet chemical etching of Copper |
1 | 2 | Tue 23 Jun, 2009 09:04 Guest |
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Glass / Quartz / SiO2 Wet chemical etching of glasses, quartz or SiO2 |
0 | 0 | No Posts |
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Gold Wet chemical etching of Gold |
1 | 3 | Wed 22 Jul, 2009 08:58 Guest |
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Nickel Wet chemical etching of Nickel |
1 | 3 | Fri 25 Jul, 2008 16:56 guest |
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Silicon Wet chemical etching of Silicon |
1 | 1 | Wed 15 Oct, 2008 04:48 Guest1 |
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SiNX Wet chemical etching of SiNX |
1 | 2 | Sat 27 May, 2006 11:25 Guest |
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Titanium Wet chemical etching of Titanium |
0 | 0 | No Posts |
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Other Materials Wet chemical etching of other materials not mentioned here |
0 | 0 | No Posts |
| Lift-Off | ||||
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Suited Photoresists Photoresists suited for lift-off application |
8 | 17 | Wed 19 Aug, 2009 07:41 Guest |
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Coating Topics on coating of various materials on the resist mask |
1 | 1 | Tue 22 Jan, 2008 12:42 guest |
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Lift-Off How to attain a good lift-off |
3 | 9 | Tue 12 Aug, 2008 16:20 Ugur_FZJ |
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