| Forum |
Topics |
Posts |
Last Post |
| Photoresist Processing |
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Specific Resists or Polymers
Questions on special photoresists or photosensitive films in general
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31 |
110 |
Thu 01 Jan, 1970 01:00  |
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Storage and Handling of Photoresists
Storage conditions, handling and the effects of photoresist ageing
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2 |
2 |
Thu 01 Jan, 1970 01:00  |
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Substrate Pretreatment
Cleaning and preparing the substrate for coating
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3 |
13 |
Thu 01 Jan, 1970 01:00  |
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Adhesion Promotion
Improving the adhesion between substrate and resist or any other films coated onto the substrate
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7 |
15 |
Thu 01 Jan, 1970 01:00  |
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Resist Coating
Spin coating, spray coating, roller coating and dip coating
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10 |
32 |
Thu 01 Jan, 1970 01:00  |
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Softbake (Prebake)
The baking step between resist coating and exposure
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1 |
2 |
Fri 26 Nov, 2010 12:31 Litho-User  |
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Rehydration
The delay between softbake and exposure
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1 |
2 |
Mon 27 Dec, 2010 17:37 Litho  |
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Exposure
Exposure of the photoresist
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13 |
35 |
Thu 01 Jan, 1970 01:00  |
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Post Exposure Bake
The baking step between exposure and development
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2 |
3 |
Thu 01 Jan, 1970 01:00  |
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Development
Developing the exposed photoresist
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3 |
6 |
Thu 03 May, 2012 10:52 ALCAVIO  |
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Hardbake
Baking the developed resist
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2 |
10 |
Thu 01 Jan, 1970 01:00  |
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Unspecific
Questions not to be related with a certain process step
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6 |
15 |
Thu 08 Mar, 2012 12:59 Rui  |
| Dry Etching |
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Deformation or Bubbling of the Fotoresist Mask
The resist mask starts roundening or foaming during dry etching
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0 |
0 |
No Posts |
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Resist Erosion
Etch rate ratio between the resist mask and the material to be etched
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1 |
2 |
Fri 06 Aug, 2010 15:29 Guest  |
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Resist Removal After Etching
Processes and media to strip the resist mask after dry etching
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1 |
10 |
Thu 01 Jan, 1970 01:00  |
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Silicon Dry Etching
Dry etching of Silicon - recipes and parameters
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0 |
0 |
No Posts |
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Dry etching of Other Materials
Dry etching of other materials - recipes, parameters and peculiarities
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3 |
3 |
Sat 19 May, 2012 23:45 gokurt  |
| Wet Etching |
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General
General topics on wet chemical etching
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6 |
8 |
Thu 01 Jan, 1970 01:00  |
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Aluminium
Wet chemical etching of Aluminium
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0 |
0 |
No Posts |
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Chrome
Wet chemical etching of Chrome
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0 |
0 |
No Posts |
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Copper
Wet chemical etching of Copper
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5 |
7 |
Thu 01 Jan, 1970 01:00  |
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Glass / Quartz / SiO2
Wet chemical etching of glasses, quartz or SiO2
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1 |
1 |
Thu 01 Jan, 1970 01:00  |
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Gold
Wet chemical etching of Gold
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2 |
4 |
Thu 01 Jan, 1970 01:00  |
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Nickel
Wet chemical etching of Nickel
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1 |
5 |
Thu 20 Oct, 2011 16:25 Guest  |
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Silicon
Wet chemical etching of Silicon
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3 |
7 |
Thu 01 Jan, 1970 01:00  |
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SiNX
Wet chemical etching of SiNX
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1 |
2 |
Sat 27 May, 2006 11:25 Guest  |
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Titanium
Wet chemical etching of Titanium
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0 |
0 |
No Posts |
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Other Materials
Wet chemical etching of other materials not mentioned here
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2 |
6 |
Thu 01 Jan, 1970 01:00  |
| Lift-Off |
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Suited Photoresists
Photoresists suited for lift-off application
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9 |
25 |
Thu 01 Jan, 1970 01:00  |
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Coating
Topics on coating of various materials on the resist mask
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1 |
1 |
Tue 22 Jan, 2008 12:42 guest  |
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Lift-Off
How to attain a good lift-off
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10 |
19 |
Thu 01 Jan, 1970 01:00  |