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Photoresist Processing  
No new posts Specific Resists or Polymers
Questions on special photoresists or photosensitive films in general
   
21 72 Mon 12 Jul, 2010 16:04
J. Brossard View latest post
No new posts Storage and Handling of Photoresists
Storage conditions, handling and the effects of photoresist ageing
   
0 0 No Posts
No new posts Substrate Pretreatment
Cleaning and preparing the substrate for coating
   
3 7 Tue 20 Jul, 2010 16:18
kanan View latest post
No new posts Adhesion Promotion
Improving the adhesion between substrate and resist or any other films coated onto the substrate
   
3 9 Mon 23 Feb, 2009 18:07
Rinke View latest post
No new posts Resist Coating
Spin coating, spray coating, roller coating and dip coating
   
6 13 Wed 03 Mar, 2010 06:38
ahie View latest post
No new posts Softbake (Prebake)
The baking step between resist coating and exposure
   
1 1 Thu 22 Jul, 2010 06:26
kanan View latest post
No new posts Rehydration
The delay between softbake and exposure
   
0 0 No Posts
No new posts Exposure
Exposure of the photoresist
   
4 15 Tue 29 Jun, 2010 13:51
Guest View latest post
No new posts Post Exposure Bake
The baking step between exposure and development
   
0 0 No Posts
No new posts Development
Developing the exposed photoresist
   
1 2 Wed 17 Jan, 2007 16:02
Guest View latest post
No new posts Hardbake
Baking the developed resist
   
1 5 Wed 04 Mar, 2009 05:34
baturin View latest post
No new posts Unspecific
Questions not to be related with a certain process step
   
3 6 Fri 14 Aug, 2009 11:04
sajjad View latest post
Dry Etching  
No new posts Deformation or Bubbling of the Fotoresist Mask
The resist mask starts roundening or foaming during dry etching
   
0 0 No Posts
No new posts Resist Erosion
Etch rate ratio between the resist mask and the material to be etched
   
0 0 No Posts
No new posts Resist Removal After Etching
Processes and media to strip the resist mask after dry etching
   
1 7 Fri 22 Jun, 2007 15:03
MK View latest post
No new posts Silicon Dry Etching
Dry etching of Silicon - recipes and parameters
   
0 0 No Posts
No new posts Dry etching of Other Materials
Dry etching of other materials - recipes, parameters and peculiarities
   
1 1 Tue 09 Jun, 2009 21:01
mike View latest post
Wet Etching  
No new posts General
General topics on wet chemical etching
   
13 13 Wed 16 Jun, 2010 04:24
Robosom View latest post
No new posts Aluminium
Wet chemical etching of Aluminium
   
0 0 No Posts
No new posts Chrome
Wet chemical etching of Chrome
   
0 0 No Posts
No new posts Copper
Wet chemical etching of Copper
   
1 2 Tue 23 Jun, 2009 09:04
Guest View latest post
No new posts Glass / Quartz / SiO2
Wet chemical etching of glasses, quartz or SiO2
   
0 0 No Posts
No new posts Gold
Wet chemical etching of Gold
   
1 3 Wed 22 Jul, 2009 08:58
Guest View latest post
No new posts Nickel
Wet chemical etching of Nickel
   
1 4 Mon 24 May, 2010 20:48
Fariborz Nadi View latest post
No new posts Silicon
Wet chemical etching of Silicon
   
1 1 Wed 15 Oct, 2008 04:48
Guest1 View latest post
No new posts SiNX
Wet chemical etching of SiNX
   
1 2 Sat 27 May, 2006 11:25
Guest View latest post
No new posts Titanium
Wet chemical etching of Titanium
   
0 0 No Posts
No new posts Other Materials
Wet chemical etching of other materials not mentioned here
   
0 0 No Posts
Lift-Off  
No new posts Suited Photoresists
Photoresists suited for lift-off application
   
9 20 Tue 09 Mar, 2010 03:37
Guest View latest post
No new posts Coating
Topics on coating of various materials on the resist mask
   
1 1 Tue 22 Jan, 2008 12:42
guest View latest post
No new posts Lift-Off
How to attain a good lift-off
   
3 9 Tue 12 Aug, 2008 16:20
Ugur_FZJ View latest post
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