| Forum |
Topics |
Posts |
Last Post |
| Photoresist Processing |
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Specific Resists or Polymers
Questions on special photoresists or photosensitive films in general
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16 |
60 |
Fri 08 Jan, 2010 05:32 acaaca  |
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Storage and Handling of Photoresists
Storage conditions, handling and the effects of photoresist ageing
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0 |
0 |
No Posts |
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Substrate Pretreatment
Cleaning and preparing the substrate for coating
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3 |
5 |
Fri 06 Mar, 2009 11:21 pdd  |
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Adhesion Promotion
Improving the adhesion between substrate and resist or any other films coated onto the substrate
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3 |
9 |
Mon 23 Feb, 2009 18:07 Rinke  |
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Resist Coating
Spin coating, spray coating, roller coating and dip coating
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5 |
12 |
Fri 05 Sep, 2008 17:34 Guest  |
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Softbake (Prebake)
The baking step between resist coating and exposure
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0 |
0 |
No Posts |
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Rehydration
The delay between softbake and exposure
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0 |
No Posts |
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Exposure
Exposure of the photoresist
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2 |
10 |
Mon 11 Aug, 2008 11:22 Guest  |
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Post Exposure Bake
The baking step between exposure and development
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0 |
No Posts |
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Development
Developing the exposed photoresist
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1 |
2 |
Wed 17 Jan, 2007 16:02 Guest  |
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Hardbake
Baking the developed resist
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1 |
5 |
Wed 04 Mar, 2009 05:34 baturin  |
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Unspecific
Questions not to be related with a certain process step
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3 |
6 |
Fri 14 Aug, 2009 11:04 sajjad  |
| Dry Etching |
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Deformation or Bubbling of the Fotoresist Mask
The resist mask starts roundening or foaming during dry etching
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0 |
0 |
No Posts |
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Resist Erosion
Etch rate ratio between the resist mask and the material to be etched
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0 |
0 |
No Posts |
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Resist Removal After Etching
Processes and media to strip the resist mask after dry etching
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1 |
7 |
Fri 22 Jun, 2007 15:03 MK  |
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Silicon Dry Etching
Dry etching of Silicon - recipes and parameters
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0 |
0 |
No Posts |
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Dry etching of Other Materials
Dry etching of other materials - recipes, parameters and peculiarities
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1 |
1 |
Tue 09 Jun, 2009 21:01 mike  |
| Wet Etching |
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General
General topics on wet chemical etching
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12 |
12 |
Thu 01 Jan, 1970 01:00  |
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Aluminium
Wet chemical etching of Aluminium
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0 |
0 |
No Posts |
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Chrome
Wet chemical etching of Chrome
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0 |
0 |
No Posts |
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Copper
Wet chemical etching of Copper
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1 |
2 |
Tue 23 Jun, 2009 09:04 Guest  |
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Glass / Quartz / SiO2
Wet chemical etching of glasses, quartz or SiO2
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0 |
No Posts |
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Gold
Wet chemical etching of Gold
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1 |
3 |
Wed 22 Jul, 2009 08:58 Guest  |
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Nickel
Wet chemical etching of Nickel
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1 |
3 |
Fri 25 Jul, 2008 16:56 guest  |
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Silicon
Wet chemical etching of Silicon
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1 |
1 |
Wed 15 Oct, 2008 04:48 Guest1  |
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SiNX
Wet chemical etching of SiNX
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1 |
2 |
Sat 27 May, 2006 11:25 Guest  |
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Titanium
Wet chemical etching of Titanium
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0 |
0 |
No Posts |
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Other Materials
Wet chemical etching of other materials not mentioned here
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0 |
0 |
No Posts |
| Lift-Off |
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Suited Photoresists
Photoresists suited for lift-off application
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8 |
17 |
Wed 19 Aug, 2009 07:41 Guest  |
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Coating
Topics on coating of various materials on the resist mask
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1 |
1 |
Tue 22 Jan, 2008 12:42 guest  |
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Lift-Off
How to attain a good lift-off
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3 |
9 |
Tue 12 Aug, 2008 16:20 Ugur_FZJ  |