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Photoresist Processing  
No new posts Specific Resists or Polymers
Questions on special photoresists or photosensitive films in general
   
10 39 Thu 01 Jan, 1970 01:00
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No new posts Storage and Handling of Photoresists
Storage conditions, handling and the effects of photoresist ageing
   
0 0 No Posts
No new posts Substrate Pretreatment
Cleaning and preparing the substrate for coating
   
2 4 Mon 01 Oct, 2007 06:35
Guest View latest post
No new posts Adhesion Promotion
Improving the adhesion between substrate and resist or any other films coated onto the substrate
   
2 7 Wed 15 Oct, 2008 10:32
baturin View latest post
No new posts Resist Coating
Spin coating, spray coating, roller coating and dip coating
   
5 12 Fri 05 Sep, 2008 17:34
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No new posts Softbake (Prebake)
The baking step between resist coating and exposure
   
0 0 No Posts
No new posts Rehydration
The delay between softbake and exposure
   
0 0 No Posts
No new posts Exposure
Exposure of the photoresist
   
2 10 Mon 11 Aug, 2008 11:22
Guest View latest post
No new posts Post Exposure Bake
The baking step between exposure and development
   
0 0 No Posts
No new posts Development
Developing the exposed photoresist
   
1 2 Wed 17 Jan, 2007 16:02
Guest View latest post
No new posts Hardbake
Baking the developed resist
   
0 0 No Posts
No new posts Unspecific
Questions not to be related with a certain process step
   
1 4 Wed 09 Aug, 2006 03:52
JAY View latest post
Dry Etching  
No new posts Deformation or Bubbling of the Fotoresist Mask
The resist mask starts roundening or foaming during dry etching
   
0 0 No Posts
No new posts Resist Erosion
Etch rate ratio between the resist mask and the material to be etched
   
0 0 No Posts
No new posts Resist Removal After Etching
Processes and media to strip the resist mask after dry etching
   
1 8 Thu 01 Jan, 1970 01:00
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No new posts Silicon Dry Etching
Dry etching of Silicon - recipes and parameters
   
0 0 No Posts
No new posts Dry etching of Other Materials
Dry etching of other materials - recipes, parameters and peculiarities
   
0 0 No Posts
Wet Etching  
No new posts General
General topics on wet chemical etching
   
201 201 Tue 06 Jan, 2009 05:18
girlfriend View latest post
No new posts Aluminium
Wet chemical etching of Aluminium
   
0 0 No Posts
No new posts Chrome
Wet chemical etching of Chrome
   
0 0 No Posts
No new posts Copper
Wet chemical etching of Copper
   
0 0 No Posts
No new posts Glass / Quartz / SiO2
Wet chemical etching of glasses, quartz or SiO2
   
0 0 No Posts
No new posts Gold
Wet chemical etching of Gold
   
1 1 Wed 31 Jan, 2007 17:28
fermion View latest post
No new posts Nickel
Wet chemical etching of Nickel
   
1 3 Fri 25 Jul, 2008 16:56
guest View latest post
No new posts Silicon
Wet chemical etching of Silicon
   
1 1 Wed 15 Oct, 2008 04:48
Guest1 View latest post
No new posts SiNX
Wet chemical etching of SiNX
   
5 6 Thu 01 Jan, 1970 01:00
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No new posts Titanium
Wet chemical etching of Titanium
   
0 0 No Posts
No new posts Other Materials
Wet chemical etching of other materials not mentioned here
   
0 0 No Posts
Lift-Off  
No new posts Suited Photoresists
Photoresists suited for lift-off application
   
7 13 Tue 03 Jun, 2008 16:17
guest View latest post
No new posts Coating
Topics on coating of various materials on the resist mask
   
1 1 Tue 22 Jan, 2008 12:42
guest View latest post
No new posts Lift-Off
How to attain a good lift-off
   
3 9 Tue 12 Aug, 2008 16:20
Ugur_FZJ View latest post
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